These answers refer to anisotropy gained through the Bosch process or some
other sidewall passivation scheme.  Maybe Mr. Zhou is asking about Cryogenic
anisotropic etching?
-NPR
  Rick Williston  wrote: I find this hard to
believe, how did they measure it? Do you know or is
there someone I can contact?

Rick

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of tangyz
Sent: Wednesday, May 15, 2002 7:47 AM
To: [email protected]
Subject: Re: [mems-talk] The Temperature of DRIE


Hi,
STS confirms the temperature on the top of the wafer is below 60
degree.
good luck

----- Original Message -----
From: "Jia Zhou"
To:
Sent: Wednesday, May 15, 2002 8:20 PM
Subject: [mems-talk] The Temperature of DRIE


> Who knows the temperature in DRIE when silicon is deep-etched, say
500microns?
>
> Thanks.
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.mems-exchange.org/
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.mems-exchange.org/
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.mems-exchange.org/
LAUNCH - Your Yahoo! Music Experience