Hello Igor,
We use either Chrome or Titanium as an adhesion layer for Platinum. Ti has
a lower stress and can handle higher temperatures, while Cr is not
attacked by BOE. We deposit using E-beam evaporation.

We typically etch Pt with Aqua Regia. PR works well for patterning.

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Battery is safe if not provoked." -- _Batteries in a Portable World_
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On Wed, 15 May 2002, iog wrote:

> Hello all,
>
> Who can tell if Pt has good adhesion to SiO2? And what can it be etched with?
>
> Thanks & Best regards,
>
> Igor
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