The DRIE temperature was measured at Carnegie Mellon
university MEMS lab (www.ece.cmu.edu/~mems) by xhu zhu
using a heat sensitive color change tape which
indicates the warmest temperature.

I do not know the exact protocol used but I was told
that the wafer stayed below 60 degrees. I do not think
this data was ever published.

Jeff

--- Rick Williston 
wrote:
> I find this hard to believe, how did they measure
> it?  Do you know or is
> there someone I can contact?
>
> Rick
>
> -----Original Message-----
> From: [email protected]
> [mailto:[email protected]]On
> Behalf Of tangyz
> Sent: Wednesday, May 15, 2002 7:47 AM
> To: [email protected]
> Subject: Re: [mems-talk] The Temperature of DRIE
>
>
> Hi,
>      STS confirms the temperature on the top of the
> wafer is below 60
> degree.
> good luck
>
> ----- Original Message -----
> From: "Jia Zhou" 
> To: 
> Sent: Wednesday, May 15, 2002 8:20 PM
> Subject: [mems-talk] The Temperature of DRIE
>
>
> > Who knows the temperature in DRIE when silicon is
> deep-etched, say
> 500microns?
> >
> > Thanks.
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