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MEMSnet Home: MEMS-Talk: MEMS Rotary motors
The Temperature of DRIE
2002-05-15
Jia Zhou
2002-05-15
tangyz
2002-05-15
Rick Williston
2002-05-15
___
2002-05-15
Jeff Zahn
2002-05-15
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MEMS Rotary motors
2002-05-16
Robert Dean
2002-05-15
kirt_williams@agilent.com
2002-05-15
kirt_williams@agilent.com
MEMS Rotary motors
Robert Dean
2002-05-16
>Hello,

I am trying to find publications on MEMS electrostatic rotary motors.  I
have the 1990 publication by Dr. Mehran Mehregany at Case Western
University entitled, "A Study of Three Microfabricated Variable-capacitance
Motors."  Are there more recent publications for this type of device?

Sincerely,

Robert Dean

Research Associate IV
Center for Advanced Vehicle Electronics
Auburn University
200 Broun Hall
Auburn, AL 36849

Voice: 334-844-1838
Fax:   334-844-1898
Email: rdean@eng.auburn.edu

reply
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