One great way of getting gas bubbles out of viscous liquids is to pull
vacuum while you heat the sample.

-Mike

>>> [email protected] 05/16/02 12:11 PM >>>
Hi, friends

In bulk microfabrication, I tried to fill a deep channel, which is
around
200um. When I use AZ5214, there are lots of air bubbles coming out when
I
bake it. So how can I solve this problem?
Do I need to use different PR? High thick PR?
I want to try SU-8, but my friends told me that is a dirty material and
not easy to remove after baking.
Thanks a lot
Hongyu
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