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MEMSnet Home: MEMS-Talk: Sensor passivation
Sensor passivation
1996-09-18
EdvardKälvesten
Sensor passivation
EdvardKälvesten
1996-09-18
Hello,

I'm working with a project where we want to the isolate the bonding pads
(gold plated) and bonding wires (gold) of a silicon sensor chip in order to
be able to use it in water. We wonder if anybody know some kind of glue
(e.g. silicone or epoxy) which is standard for this kind of passivation of
silicon sensors. The glue must have very good adhesion to the plasma
nitride which covers the aluminium  conductors, it  must have a good
thermal and mechanical behavior when it is exposed to water and it must be
completely electrically isolating in water for at least 10 hours.

Best regards,

Edvard K=E4lvesten
Department of Signals, Sensors and Systems
S-100 44 Stockholm, Sweden
=46ax: +46  8 100858
E-mail: edvard@instrlab.kth.se


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