Yes, thick AZ often produces bubbles.

I experienced that AZ 9260 produces much less bubbles than the other AZ
Photoresists I use.

Also ramping up the baking temperature real slow helps a lot to avoid bubbles.


Good Luck

Danny

----- Original Message -----
From: hongyuyu 
Date: Wed, 15 May 2002 13:06:50 -0700 (PDT)
To: 
Subject: [mems-talk] Help on thick photoresist


> Hi, friends
>
> In bulk microfabrication, I tried to fill a deep channel, which is around
> 200um. When I use AZ5214, there are lots of air bubbles coming out when I
> bake it. So how can I solve this problem?
> Do I need to use different PR? High thick PR?
> I want to try SU-8, but my friends told me that is a dirty material and
> not easy to remove after baking.
> Thanks a lot
> Hongyu
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