From:   IN%"edvard@instrlab.kth.se" 19-SEP-1996 16:14:54.19
To:     IN%"MEMS@isi.edu"
CC:
Subj:   Sensor passivation

I would suggest paralyne coating, which is a vacuum deposited
polymer.  It has very high resistivity, is chemically inert, and
has a high "throwing power" for very thin films.

If a thin coating is not necessary one of the circuit board
passivation coatings could be used.

best regards
mark

Edvard asked:
.Hello,
.
.I'm working with a project where we want to the isolate the bonding pads
.(gold plated) and bonding wires (gold) of a silicon sensor chip in order to
.be able to use it in water. We wonder if anybody know some kind of glue
.(e.g. silicone or epoxy) which is standard for this kind of passivation of
.silicon sensors. The glue must have very good adhesion to the plasma
.nitride which covers the aluminium  conductors, it  must have a good
.thermal and mechanical behavior when it is exposed to water and it must be
. completely electrically isolating in water for at least 10 hours.


Mark W. Lund, PhD
Director             >> Soft X-ray Web page http://www.moxtek.com<<
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