We have tried Cu and it does not seem to be affected by HF. Ti dissolves
in HF...
Michael Pedersen
The MEMS Exchange

Jing Liu wrote:
> To who may concern,
>
> Does anyone know whether thin coated film of Cu could resist concentrated HF
> etching? How about other metal like Ni and Ti? Are there any reference I could
> find?
>
> Jing
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