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MEMSnet Home: MEMS-Talk: Spin coat wax on glass wafer
Spin coat wax on glass wafer
2002-05-23
Gaoshan Jing
2002-05-23
Karl Cazzini
2002-05-28
Gaoshan Jing
2002-05-28
Luesebrink Helge
Spin coat wax on glass wafer
Gaoshan Jing
2002-05-23
Hi:
Folks. I am trying to spin coat a thin film of wax on a 2 inch glass wafer. I
made wax solution by diluting wax in butanol. But it is difficult to get
uniform wax film. Does anyboby have some good advice for me?

Thanks in advance.
Gaoshan Jing

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