Yes, it does look like Applied Materials are eyeing up the MEMS market.
They are currently offering deep silicon etching for trench isolation on
CMOS on their standard machines.  Applied Komatsu (the part of AM who make
equipment for the displays market) were present at the Las Vegas MEMS show
earlier this year, but not saying much.  Now we have heard about AM offering
heavy discount to a key research lab in the far east to buy a multi-chamber
system for photonics (waveguide dep and etch).  The brochure we have seen
also includes deep silicon using the Bosch process.  There are a number of
people in the equipment industry who are feeling distinctly nervous at the
moment!
Martin
>Does that mean APPLIED MATERIALS is planning a full frontal assault on the
MEMS Market in the near future?
>Look what happen to SPEEDFARM INC. and the CMP Market when APPLIED
MATERIALS nudged in. Phil
> -----Original Message----- From: Martin.WALKER@oxinst.co.uk Sent: 20 May
2002 12:33 To: mems-talk@memsnet.org  Subject:
RE:[mems-talk] DRIE etching of bulk silicon


Martin Walker B.Sc.(Tech.) M.Sc.
Tactical Marketing Engineer
Oxford Instruments Plasma Technology
North End, Yatton, Bristol, BS49 4AP UK
T.+44 (0)1934 837031  F.+44 (0)1934 837001
E. 
W. 


 ###  OXFORD INSTRUMENTS   http://www.oxford-instruments.com/  ###

Unless stated above to be non-confidential, this E-mail and any
attachments are private and confidential and are for the addressee
only and may not be used, copied or disclosed save to the addressee.
If you have received this E-mail in error please notify us upon receipt
and delete it from your records. Internet communications are not secure
and Oxford Instruments is not responsible for their abuse by third
parties nor for any alteration or corruption in transmission.