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MEMSnet Home: MEMS-Talk: how to improve the adhesion between the SU8 structure and the silicon wafer ?
how to improve the adhesion between the SU8 structure and the silicon wafer ?
2002-05-23
Kuo Wu Cheng
how to improve the adhesion between the SU8 structure and the silicon wafer ?
Kuo Wu Cheng
2002-05-23
Dear all:

         How to improve the adhesion between the SU8 structure and the silicon
wafer while the wafer is put into the KOH solution doing
an anisotropic etching. I find the SU8 structure doesn't destruct but will
peel off from the wafer in the KOH etching.
         Thank you very much!

compilments

BagelKuo

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