Dear Mems-People,

we are in the process of acquiring a Nano Imprint Lithography (NIL)
tool.
On the market are some multi-tools which can do both NIL and Anodic
Bonding.
Does any of you users have "hands-on" experience with such a tool?
What is your impression?
I'm especially interested in hearing about cross contamination problems.

Sincerely

Reni Fliron, M.Sc.
process specialist, MIC