Hi,Everyone

I used platinum/Ti(1000A/200A) as the material  of sensors,and patterned
sensors by wet etching.But there is a strange problem that the sensor show the
NTC(negitive temperature coefficient).The metal material should be
PTC(positive temperature coefficient) well-know including platinum.Does anyone
know what happend or ever run into this strange
problem? Thanks a lot.




Hsien Lung Ho
the second year master student( Microsystem Lab.)
Engineering and System Science Dept.
National Tsing-Hua University
101, Sec. 2, Kuang-Fu Road
Hsinchu ,Taiwan 300 , ROC

Tel :886-3-5715131 ext.5832
Fax: 886-3-5720724