Does anyone have ideas on a cleaning process that will remove silane
chemistries from SIlicon without affecting Si or SiO2? Maybe a mechanical
clean?

-chris

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Christopher Khoury          Nanosphere, Inc.
Microsystems Engineer       1818 Skokie Blvd. Suite 200
[email protected]  Northbrook, IL 60062
W:(847)656-0240             F:(847)562-8886