Hi Faheem,

LPCVD silicon nitride survives HF.  I have used this as a protective layer
in a sacrificial etch using 48% HF.

best wishes,

Helen.

Dr Helen Berney, MIEEE, MEBF
National  Microelectronics Research Centre, Prospect Row, Cork, Ireland
Tel +353-21-4904010  Fax +353-21-4270271   Email hberney@nmrc.ie
http://www.nmrc.ie/research/transducers-group/index.html


-----Original Message-----
From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On
Behalf Of Faheem.Faheem@Colorado.EDU
Sent: 30 May 2002 16:29
To: mems-talk@memsnet.org
Subject: [mems-talk] dielectric materials can survive HF


Hello All

I am testing a MUMPS capacitor, and I need a dielectric layer.

Does anyone know of dielectric materials can survive HF?
In addition to, it has high dielectric constants!



***********************************
Faheem F. Faheem
University of Colorado
Mechaical Engineering
Campus Box 427
Boulder, CO 80309
PH: 303-492-0877
Fax: 303-492-3498
http://mems.colorado.edu
***********************************
_______________________________________________
mems-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.mems-exchange.org/