MEMS-talk

News	MEMSnet Home: MEMS-Talk: HF and photoresist mask HF and photoresist mask 2002-05-30 Jing Liu 2002-05-30 Mighty Platypus 2002-05-30 Bill Moffat 2002-05-30 Henry Yang 2002-05-30 [email protected] 2002-06-03 Soojin Oh 2002-05-31 Jing Liu 2002-05-31 Mighty Platypus metal-glass bonding and debonding 2002-06-03 carlton watson 2002-05-31 Greg Miller 2002-05-31 Bill Moffat 2002-05-31 Bill Moffat 2002-05-31 Bill Moffat 2002-05-31 Jing Liu 2002-05-31 Roger Shile HF and photoresist mask Jing Liu 2002-05-31 Jesse, Did you do hardbake after litho? How did you clean the oxide suface? Jing reply
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