There are tapes made by Mitusi, Lintec, and Nitto that are chemical
resistant tapes.  These are mainly used as backgrind tapes.  Nitto, Lintec,
and Furukawa make UV releasing dicing tape.  If you cannot find their phone
numbers P-mail me and I will send them to you.

Scot




"Roger Shile"  on 06/05/2002 05:06:45 PM

Please respond to [email protected]

To:    [email protected]
cc:     (bcc: Scott Sullivan/Disco_Corp)
Subject:    [mems-talk] backside protection



I am looking for a tape to put on the backside of 100 mm Si wafers to
preserve
the oxide on the back, while etching the front in buffered oxide etch.

I have seen this done using dicing tape.  A coworker told me about
something
called "Yellow Tape" that came in circular pieces the same size as the
wafer,
apparently made for this purpose.  After use, the Yellow Tape was removed
with
acetone, which would be an advantage over peeling dicing tape from delicate
substrates.

Could someone refer me to a source for this Yellow Tape or suggest an
alternative?

Roger Shile

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