Yes it does.

al


Message: 9
Date: Thu, 6 Jun 2002 15:30:50 +0100
From: Christopher F. Blanford
  
To: [email protected]
Subject: [mems-talk] oxide layer on SiN films?
Reply-To: [email protected]

Hello,

Does anyone know whether SiN thin films form an oxide layer on it in the
same way that Si does?

Regards,

Chris Blanford



Avi Laker
Teccor Electronics