PGMEA will attack the resist.  It is the base solvent for pretty much the
entire AZ series. It will dissolve both the exposed and unexposed regions of
the photoresist..

Best Regards,

Chad Brubaker



EV Group-Technology, Tel: (602) 437 9492 x 119, Fax: (602) 437 9435
E-mail: [email protected],  Web: www.EVGroup.com, 06/17/02

 -----Original Message-----
From:   LSWANG [mailto:[email protected]]
Sent:   Monday, June 17, 2002 1:34 AM
To:     [email protected]
Subject:        [mems-talk] SU8 developer ?

Hi,

Does anyone know if SU-8 developer such as PGMEA also
attacks AZ series ( after exposed ) Photoresist.
Thanks.

Lisen Wang
Yahoo! - Official partner of 2002 FIFA World Cup
http://fifaworldcup.yahoo.com
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