Hi all,
I've found in an article published in 1992 by C.de Besten and others of
the MESA research institute of  Twente "Polymer bonding of micromachined
silicon structures" Microelectromechanical Systems 92, Travemunde
(Germany), that negative photoresist Waycoat 3lC by Olin Hunt could be
used for wafer bonding.
The problem is that I'm not able to find the supplier's adress on the
Web.
Does Anybody know the new name of the society?
Thank you very much.
Best Regards



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Dr. Paolo Bondavalli
R&D Engineer
LABCOM - MICROTEC
THALES (ex THOMSON-CSF) CORPORATE RESEARCH CENTER
Domaine de Corbeville,
Route Departementale 128
F91404 ORSAY
(FRANCE)
Tel : 01 69 33 08 63
Fax : 01 69 33 08 62
Email : Paolo.Bondavalli@thalesgroup.com
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Disclaimer: Opinions expressed herein are my own and may
  not represent those of my employer.
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