Hi YanJun,
I don't think you can model and simulate a piezoresistive effect using the
piezoelectric element of ANSYS!
what you can do is to try and model a diaphragm, apply the stress or pressure on
it, then read out the stress on the diaphragm and convert it into output voltage
using the piezoresistive equations.
hope this help.
AJ Pang
----- Original Message -----
From: "Yuan-Fang Chou"
To:
Sent: Tuesday, June 18, 2002 2:50 AM
Subject: Re: [mems-talk] Piezoresistor simulation
> Yanjun,
>
> There is a paper that you might be interested in. It is
>
> Chou, Yuan-Fang, and Lin, Rong-Sheng, "Optimization for Piezoresistor
> Design," Proceedings of the 13th European Conference on Solid-State Sensors,
> Actuators and Microsystems , pp. 65-68, The Netherlands, 1999.
>
> Yuan-Fang
>
>
> ----- Original Message -----
> From: "Yanjun(David) Tang"
> To:
> Sent: Monday, June 17, 2002 10:43 AM
> Subject: [mems-talk] Piezoresistor simulation
>
>
> > Hello, folks
> > I am doing piezoresistor simulation in MEMS using the program ANSYS. Do
> you
> > have some clues about what kind of couple-field element in Ansys can
> account
> > for the interaction between displacement of element ( the displacemetn
> induces
> > stress and stress induces strain of element then), and the change of its
> > resistivity. The piezoelectric element only reflects how structural
> > displacement affect voltage distribution.
> > Thanks
> >
> > Yanjun Tang
> >
> > Louisiana Tech Univeristy
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