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MEMSnet Home: MEMS-Talk: SU-8 cracking, UV filter
SU-8 cracking, UV filter
2002-06-20
Mona Klein
2002-06-23
gang hong
SU-8 cracking, UV filter
Mona Klein
2002-06-20
Hi all,

we use SU-8 2010 formula supplied by microchem Berlin.
Our usual thickness is 15um, exposure time is 19s (broad band UV,
10mW/cm^2)

We can't get rid of surface cracks.
We tried longer relaxation times, baking in a convection oven, different
exposure times, but none of these led to significantly improved results.

Has anyone some experience if using a UV filter does not also prevent
T-topping, but also reduce cracking?

Thanks a lot,
    Mona

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