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MEMSnet Home: MEMS-Talk: Waycoat Resist - Re: MEMS-talk digest, Vol 1 #322 - 12 msgs
Waycoat Resist - Re: MEMS-talk digest, Vol 1 #322 - 12 msgs
2002-06-21
[email protected]
Waycoat Resist - Re: MEMS-talk digest, Vol 1 #322 - 12 msgs
[email protected]
2002-06-21
Caio Paolo -
You can find the Waycoat products as SC Resist from
Arch Chemicals. It comes in various viscosities.
If you have problems locating them get back to me.
con piacere
caio,
avi


Message: 7
Date: Tue, 18 Jun 2002 17:23:09 +0200
From: Paolo Bondavalli 
Organization: THALES LCR
To: [email protected]
Subject: [mems-talk] Waycoat
Reply-To: [email protected]

Hi all,
I've found in an article published in 1992 by C.de Besten and others of
the MESA research institute of  Twente "Polymer bonding of micromachined
silicon structures" Microelectromechanical Systems 92, Travemunde
(Germany), that negative photoresist Waycoat 3lC by Olin Hunt could be
used for wafer bonding.
The problem is that I'm not able to find the supplier's adress on the
Web.
Does Anybody know the new name of the society?
Thank you very much.
Best Regards



Avi Laker
Teccor Electronics
972 756 8237   Office
214 439 6770   Pager

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