dear fellow ,
I need to delineate a PN junction  .(to etch more the doping zone than
undoped)
.Do you know something about the gas ,Ratio % ,sccm ;RF power, pressure
thanks you for your suggestions


        Arnaud Margolli
        DGA - Celar
        division DIRAC-TECN
        failure analysis -ECE Dep
        + 33  (0)  2 99  42 66 06