Dear David

Here are a few literature references for PECVD SiN:
1. "Characterization of the optical properties of PECVD SiNx films using
ellipsometry and reflectometry." Asinovsky, L.; Shen, F.; Yamaguchi, T.
Thin Solid Films 1998, 313-314, 198-204
2. "The correlations between physical and electrical properties of PECVD
silicon nitride (SiN) with their composition ratios." Samuelson, G. M.;
Mar, K. M. J. Electrochem. Soc. 1982, 129(8), 1773-8.
3. "Effect of substrate temperature on the properties of PECVD silicon
nitride (SiN) films." Zhang, Xiumiao; Yang, Ailing; Shi, Guohua; Jiang,
Chunye; Wang, Dan; Bao, Lei. Hangzhou Daxue Xuebao, Ziran Kexueban 1988,
15(4), 410-15.

The first one discusses their measurement technique, but covers some
optical properties for different stoichiometries.
The point of the last one, which is written in Chinese, is that the
refractive index increases with increasing substrate temperature during
deposition.
The second one is probably closest to what you're after for just data.

Chris

On Wednesday, June 26, 2002, at 06:00  am, qwer 1234 wrote:

> Hi,
>
> Can someone point me to sources where optical properties of SixNy can
> be checked? I need the index of refraction and index of absorption data
> for the 1500 nm wavelengths.
>
> Thanx,
> David

--
Christopher F. Blanford
Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
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