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MEMSnet Home: MEMS-Talk: etching cavities in borosilicate glass
etching cavities in borosilicate glass
2002-06-26
Alex Pozdin
etching cavities in borosilicate glass
Alex Pozdin
2002-06-26
Hello,
we are looking for the way to etch two concentric square cavities in
borosilicate glass slides 25x 75x 0.5 mm. Close to the surface is a cavity
22x22mm 110+/-10um deep and second cavity is 16X16 mm and 67+/- 20 um deep.
Minimal roughness on the bottom of second cavity is required for visible light
detection. It could be done out of 3 pieces of glass, but this way is
expensive. Please, advice
Regards,
Alex Pozdin,
Director of Engineering
5 Danuser Dr.
Hermann, MO 65041 USA
ph. 573-486-5500
e-mail: [email protected]
fax 573-486-5540

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