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Wafer bonding
2002-06-28
FAURE Nicolas
2002-06-28
kirt_williams@agilent.com
Wafer bonding
FAURE Nicolas
2002-06-28
Dear MEMS Researchers,

I would like to bond  SOI wafers (4") but one of them presents an important
bow (190um).
Do you know if we can find glue or glue-film or a specific bonding process
to bond them?

Thanks for your help,
Have a nice day,

Nicolas FAURE.

********************************************
Nicolas FAURE
R&D Engineer
COLIBRYS SA Microsystems Manufacturing
Maladihre 83
2007 Neuchbtel
SWITZERLAND
Web site          www.colibrys.com
Direct phone      0041-32-720-5059
Fax:              0041-32-720-5784
E-mail            nicolas.faure@colibrys.com

********************************************

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