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MEMSnet Home: MEMS-Talk: Contact Lithography and Scanning
How to plasma etch Al?
2002-06-10
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2002-06-10
[email protected]
Contact Lithography and Scanning
2002-07-07
Sreemanth M Venkata Uppuluri
Contact Lithography and Scanning
Sreemanth M Venkata Uppuluri
2002-07-07
Hi Everyone,

I am looking for ways to scan my sample (which is a wafer coated with
resist) while in contact with a mask (which is a glass wafer containing
some patterns> during the exposing step. The contact is essential and also
the scanning. Has anyone tried this before? Please let me know.

Thanks
Sreemanth

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