Hi,
  Does any one have experience using a PECVD system normally used for
nitride deposition to perform the growth of nanotubes? I'm not
interested in recipes so much as issues of contamination. My concern is
that the introduction of methane and a metal (in trace amounts) into the
system will forever be the end of production of low stress nitrides.
What about metal and carbon contamination in general?

Thanks in advance,
    Mike