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MEMSnet Home: MEMS-Talk: Al evaporation
Al evaporation
2002-07-11
Zhihai Zhang
2002-07-12
Rick Williston
2002-07-12
Neal Ricks
2002-07-12
Milan Buncick
2002-07-12
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Al evaporation
Neal Ricks
2002-07-12
 Zhihai,
I evaporate Aluminum right out of the hearth.
Neal
  Zhihai Zhang  wrote: Hello everyone,
I need do Al e-beam evaporation frequently.
However after several times, Al always spill out of the crucible and get the
crucible cracked. I use small ramp rate, it still happened.
How can I prevent it?
Thnaks,

Zhihai
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