A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Negative Photoresist
Negative Photoresist
2002-07-12
Perfumer_SN
Negative Photoresist
Perfumer_SN
2002-07-12
Hi

I think you may try Cr or Ti. They show good adhesion properties on SU-8.
Thus, they might be good candidates for your application.

                                           Best Regards


Ming


----- Original Message -----
From: Perroud, Olivier 
To: 
Sent: Wednesday, January 30, 2002 5:19 PM
Subject: [mems-talk] Negative Photoresist


> Hi,
>
> In my research project, I need to find a metal layer which hang very good
on
> SU8 and AZ.. photoresist. I am wondering where I can find a list of such
> information for commonly used metals.
> Could anyone help me?
>
> Thanks.
>
> olivier
> _______________________________________________
> mems-talk@memsnet.org mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.mems-exchange.org/

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
Mentor Graphics Corporation
MEMS Technology Review
MEMStaff Inc.