Luke,

EVG is using megasonic cleaning in its SOI wafer bonding equipment. The
cleaning station is available as a stand alone system for mask and wafer
cleaning.


Check out our Web site http://www.evgroup.com/products/wafercleaning.htm

Looking forward to hearing from you soon.
With very best regards,

Helge W. Luesebrink

EV Group, Inc. - Regional Sales Manager -Tel: (401) 784 0008; Fax: (401)
784 9933; e-mail: [email protected] ; Web site: www.EVGroup.com




-----Original Message-----
From: Luke Ghislain [mailto:[email protected]]
Sent: Sunday, July 14, 2002 10:48 PM
To: [email protected]
Subject: [mems-talk] Megasonics


Hello,

We are looking into megasonics wafer cleaning for the removal of particles
down to the submicron level. Can anyone recommend vendors?

Thanks,

Luke Ghislain
Yahoo! Autos - Get free new car price quotes
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