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MEMSnet Home: MEMS-Talk: Megasonics
Megasonics
2002-07-14
Luke Ghislain
2002-07-15
Beverley Eyre
2002-07-15
Birol Kuyel
2002-07-15
Luesebrink Helge
2002-07-15
Gang Zhang
2002-07-15
Michael D Martin
Megasonics
Michael D Martin
2002-07-15
We (U of Louisville, E.E. dept.) just had a SUSS CL200 installed with
megasonic cleaning. So far, so good...

-Mike

>>> lukeghislain@yahoo.com 07/14/02 07:48PM >>>
Hello,

We are looking into megasonics wafer cleaning for the removal of
particles down to the submicron level. Can anyone recommend vendors?

Thanks,

Luke Ghislain
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