we deposited tantalum on si (100) substrate with and without SiO2 layers
using sputtering.   It has good adhesion on both si and sio2.

Does any body have an idea how good is its adhesion on copper ?

Muralidhar


> [email protected] 07/15/02 10:22PM >>>
Ta has very good adhesion property but very poor
stress property.

- samrat

--- "Thomas B. Jones"  wrote:
> We are considering the use of Ta for simple coplanar
> electrode strips (10
> microns wide and 1000 microns long) patterned on
> quartz wafers, or maybe on
> top of an LTO layer deposited on the quartz.  I
> imagine we have to
> planarize to put this stuff down on the LTO, but are
> adhesion promoters
> needed?  Are there any serious pitfalls to avoid in
> the use of this metal?
> All suggestions or advice will be appreciated.
>
> T.B. Jones
>
>
>
________________________________________________________
> Thomas B. Jones
> Professor of Electrical Engineering
> University of Rochester
> P.O. Box 270126
> Rochester, NY  14627-0126    (USA)
> phone: 1-585-275-5233   fax: 1-585-273-4919
> email: [email protected]
> http://www.ece.rochester.edu/~jones
>
________________________________________________________
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