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Many suppliers commercially, vary from high quality to average quality.  Low
load, easy to assemble kits are found in any optics supply house: for 3-axis
~$1500 to $3000 system light duty system.  For premium quality try the UHV
stages with pezioelectic drives.  Inchworm-drive moves the stage with three
transducers, the middle transducer is 90 degrees out.  Accuracy is digital and
depends on how you process the current.  Burhlegh has some of the best sub
micron stuff.  Used in ion mills, SEM's and soft x-ray lithography machines.
The speed of travel is more dependent on the motor and bearing design.
Mechanical drives are ruged and fast, but have a problem of backlash and wear,
practical limit is near or at 1 micron.   Lubrication is critical and
cleanliness is important.

Rob

>----- Original Message -----
>From: "Michael D Martin"
>
>To: 
>Sent: Tue, 16 Jul 2002 10:27:34
>
>Try Dover Instruments in just outside of Boston.
>
>-Mike
>
>>>> jltan@SIMTech.a-star.edu.sg 07/16/02 03:32AM
>>>>
>I'm looking for a small XY stage (50mm x 50mm) with
>a max speed of
>about
>200mm/s and with repeatability of +/-1um.
>
>Does anybody do stages like this?
>Would really appreciate the information.
>
>JooLett
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>-talk