Dear all,

I want to protect wafer frontside when I etch through the wafer from
the backside. Could you give me some advice how to carry on it?

Smoe use black wax or crystalbond i509 or something else to protect
frontside. But I think they could cause contamination to my transistors.
Besides, wafer holder is not a good choice either, because it is troublesome
to operate and the wafer is easy to crack.

LTO could be a choice. But how to remove it after the wafer etching through?

Any advice will be appricated.

Regards,
Li Gang


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