> we have 150 mm mechanical structured BSOI wafer. The edge is not structured
> at a distance of 10mm. Does anybody has experience how to handle such wafer
> only at the outer edge using a vacuum wall since the inner device area can
> not be used. Or does anybody know a distributor of such shaped wakuum walls.
> Conventional vakuum walls does not fit.

Torsten,
the "fragile/backside" handling kit for our Eclipse PVD tools might be
what you need. I'm pretty sure we'd sell individual parts like the
pickup blade or orienter chuck. Let me know if you're interested and
I'll get you in touch with our Dresden office.

best regards,
klaus
--

                        (TEEL)          Tokyo Electron Europe Limited
                                        PVD Process Support  (ex MRC)
Klaus Beschorner                                   Tel +49-7033-45683
Drosselweg 6                                       Fax +49-7033-45631
71120 Grafenau, Germany                       Mobile +49-174 315 7754