A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: RIE of Cr
RIE of Cr
2002-07-23
David Peyrade
2002-07-23
[email protected]
2002-07-23
[email protected]
RIE of Cr
[email protected]
2002-07-23
You might want to add some Oxygen as well. Low pressure and high bias 400
watts should do the trick. Low pressure < 10 millitorr depending on your
reactor. Bob Henderson

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Mentor Graphics Corporation
Harrick Plasma, Inc.
MEMStaff Inc.