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MEMSnet Home: MEMS-Talk: adhesion of Ag to Si
adhesion of Ag to Si
2002-07-24
Thomas B. Jones
2002-07-25
Jeff Zahn
2002-07-26
Zhen YANG
2002-07-24
BobHendu@aol.com
2002-08-14
TEL Klaus Beschorner
adhesion of Ag to Si
BobHendu@aol.com
2002-07-24
Tom:
A thin layer of Cr will definitely help with the adhesion of Ag on Silicon.
If you must deposit directly onto a Si surface you can do an Argon presputter
clean prior to deposition and that should help with the adhesion. If you are
using an evaporator without clean capability you might want to try to plasma
clean samples and run immediately after plasma clean. Bob Henderson

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