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MEMSnet Home: MEMS-Talk: Wet oxide etch selective to Ti
Wet oxide etch selective to Ti
2002-07-26
[email protected]
Wet oxide etch selective to Ti
[email protected]
2002-07-26
Dear all

I am looking for a wet etch process to etch PECVD Silicon Dioxide with a
good selectivity to Titanium.  Ideally, I would like to etch 500-1000
Angstroms of SiO2, with a minimal loss of Ti.

Any ideas gratefully received

Many thanks

Andrew Whitworth




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