Greetings,
I'm looking for any references or work regarding physical and mechanical
properties of PZT layers deposited via PVD. Of special interest are
thickness limitations, adhesion to various other layers (especially
electrode layers and SiO2 layers), the effects of various annealing
regimes on physical and mechanical properties, and/or the effects of
deposition conditions or annealing regimes on film integrity.

Thanks in advance,

Eric York