Hi
We also know the problem with removing cool grease.
So first of all: Avoid Cool grease whenever you can.
I glue my pieces for dry etching on 4" wafers by using
white wax from www.aremco.com
It works well and can be easily removed.
I don't know if the temperature on the surface is lower
using cool grease or white wax.

To remove cool grease:(recipe from a friend)
Put in hot (800C) Pyridin (C5H5N) for about 30 Min.
(Smells bad, do it in flow bench)
Then clean in Acetone, followed by Isopropanol, followed by DI water.
After drying put in O2 plasma reactor.
It is not needed to use ultrasonic.

Good luck

_____________________________________________________
Dr. Stefan Blunier
ETH Zentrum, CLA G 21.2
Institut fuer Mechanische Systeme
Tannenstrasse 3
CH - 8092 Zuerich
Switzerland

Tel:   +41 1 632 77 64
Fax:  +41 1 632 11 45
e-mail: [email protected]
__________________________________________________


-----Original Message-----
From: Yuqi Jiang [mailto:[email protected]]
Sent: Montag, 29. Juli 2002 04:53
To: [email protected]
Subject: [mems-talk] how to remove cool grease on the wafer


Hi,all,
I use cool grease during DRIE. After DRIE, some of
cool grease  was remained on the wafer surface, then,
the wafer  was soaked in acetone or IPA for more than
1 hour, but both were useless.
   how to remove cool grease?
  I will be very grateful if anyone give me some
information.
  Thanks!
Yahoo! Health - Feel better, live better
http://health.yahoo.com
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