Hi Xiaoshan
We add problem with humidity and it effects the electrical measurements. The
resistivity also changes  if you working without humidity control.
Good luck,
Atzmon Ofri


-----Original Message-----
From: Xiaoshan Zhu [mailto:[email protected]]
Sent: Saturday, July 27, 2002 2:05 AM
To: [email protected]
Subject: [mems-talk] problem in diamond film


Hi, there,

Does sombody process diamond film (on Si substrate)?

I deposit Au layer(4000A) to form two electrodes on diamond film(>6um).
These
two electrodes are sperated by etching. But Test always shows that there is
a
resistance (~400K)between two electrodes. I am very confused about it. I am
quite sure Au doesn't touch with Si substrate and no crack in diamond film.

Do you have some good analysis?

Thanks very much!

Xiaoshan
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