Hi, everyone,

I am working with AZ1518 on flat panel display. Could anyone give me some
suggestion what kind of
hard bake temperature I should use? I just want to bake 1.6 um resist hard
enough to resist wet
etching.

Thanks.


Yun Li
KWB405, Thin Films Lab
Micro and Nano Structures
One Research Circle, Niskayuna, NY 12309
GE Global Research Center