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MEMSnet Home: MEMS-Talk: Information on Au metal line on silicon substrate
Information on Au metal line on silicon substrate
2002-08-03
Ken Kwon
Information on Au metal line on silicon substrate
Ken Kwon
2002-08-03
Hi,  I am trying to use gold metal lines on p+ and n+ silicon surface.  I am
in split decision between using TiW/TiW-N or Ti/Ti-N for underlying
diffusion barrier/adhesion layer.  Could someone tell me what's advantage of
using particular diffusion barrier/adhesion layer for gold metallization?
Reference books or articles are also appreciated.

Thank you

Ken

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