Dear all:
I would like to know the data of PMMA in vacuum.
Our operator insisted that PMMA can be outgased in metal(Au) sputtering
system.
Then the chamber wall would be  contaminated.
But PMMA can be used in E-beam lithography in UHV.
Could you please give me any data about it or
 tell me your experiences between vacuum and PMMA in sputtering system?
Thanks in advance.

Sungjun Lee / Graduate student.
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Mr. Sungjun Lee
Center for Science in Nanometer Scale,
Inter-University Semiconductor Research Center,
Seoul National University,
Seoul, 151-742, South Korea
Mobile:+82-16-2264658
Fax:+82-2-8748926
Mail:[email protected]
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