Bill,

It sounds like a good idea, but unfortunately the epoxy we use must not be
exposed to temperatures above ~60oC, otherwise it starts getting soft and we
lose our features. Can it be done at the lower temperature? What sort of
gases do you recommend, SF6 or CF4 as well as O2, Ar, N2? We use hexane to
remove silicone and have a plasma asher with the latter of the gases
connected, which is used just prior to the metallisation. Do you know of any
adhesion promoters (HMDS?) which would work on epoxy? Also, where abouts are
you based, USA?

Kind regards,

Fred.

-----Original Message-----
From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On
Behalf Of Bill Moffat
Sent: 07 August 2002 15:39
To: mems-talk@memsnet.org
Subject: RE: [mems-talk] Adhesion of metal to epoxy substrates


Fred,
     This could explain a number of special units we have built with no
indication of the final use.  These are special Plasma/Silane deposition
units.  Think stainless oven set at 150 degrees C able to do vacuum priming
with flat capacitive stainless plasma generators for precleaning.  let me
know
if you want to test this approach.  Bill Moffat

-----Original Message-----
From: Fred Hussain [mailto:fh1@techprt.co.uk]
Sent: Wednesday, August 07, 2002 1:31 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Adhesion of metal to epoxy substrates


Dear Collegues,

I am looking for any advice/information on how to improve adhesion of
evaporated metal (nichrome + gold) onto thermo-epoxy based substrates. In
particular, information on chemical and physical (plasma) surface
pre-treatments and/or alternative metals which may have a distinct advantage
over nichrome and gold, would be highly appreciated.

Thanking you in advance,

Fred.
_______________________________________________
MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/
_______________________________________________
MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/