You can cut a sheet of aluminum foil (say 2"x2" square), and sputter
deposition for 10 minutes.  Then weigh the weight gain.  Assuming 99% of bulk
density, you can get your rate (for gold and silver) calibrated.

Yinbao Yang
704-887-3194

-----Original Message-----
From: pm72 [mailto:[email protected]]
Sent: Wednesday, July 31, 2002 5:24 PM
To: [email protected]
Subject: [mems-talk] Silver sputtering


Is there are relation between the silver sputtering rate and a gold spuutering
rate . please give me the details, I am trying to use this Crssington sputer
coater system 108 which does not have a thickenss reader/monitor. So I have
the particular readings for gold sputtering which I got from the
manufacturers. I am unable to figure out  the relation ship between gold and
silver sputtering rates. I guess silver sputtering rate is comparitively less
than gold but by HOW MUCH????

fabbi.

PHANEENDRA MEDIDA
Research Assistant
Magnetic MEMS(Dr.Gary Friedman),
Drexel University,
Philadelphia PA 19104
215-895-0271
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