Lisen,

Hello.  I use liquid crystal polymer (LCP) substrates in my research, and I
sputter aluminum on them without any thermal problems.  LCP is resistant to
many chemicals, including piranha etch.  Oxygen plasma RIE will etch LCP
though.

Sincerely,

Robert Dean
Auburn University.

At 11:08 PM 8/13/02 -0700, you wrote:
>Dear MEMS community:
>
>I want to put gold on some plastic substrate by
>evaporation, either thermal or e-beam. Does any one
>know which kind of plastic can survive for this
>application. BTW, how to clean plastic wafers?
>Any comments is appreciated.
>
>Lisen
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